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Semiconductor Equipment PEEK Body Standard Or Custom Shape
A Semiconductor Equipment PEEK Body is a component made of polyetheretherketone (PEEK) material used in semiconductor manufacturing equipment for its high temperature resistance, chemical resistance, and low particle generation.
PEEK (Polyether ether ketone) is a high-performance thermoplastic polymer that is widely used in the semiconductor industry due to its excellent mechanical, thermal and chemical properties.
In semiconductor equipment, PEEK bodies are commonly used in components that require high-temperature resistance, chemical resistance, and dimensional stability. Some of the semiconductor equipment that typically use PEEK bodies include:
Wafer handling robots
Chemical delivery systems
Etching equipment
Ion implantation equipment
Gas delivery systems
Vacuum chamber components
PEEK's unique combination of properties makes it an ideal material for these applications, as it can withstand harsh environments while maintaining its structural integrity.